Metal Mask for Vapor-Deposition Patterning
Thermal expansion coefficeient can be matched to substrates to reduce motion of pattern during deposition.
For vaporization deposition, repltace photolitho-graphy be metal mask system. Higher precision, low thermal expansion and island mask are available.
|Applications||1.Vapor-Deposition of OEL
2.Patterning Electrodes of LED
3.Patterning Electrodes of ITO film
|Features||Low thermal expansion, varous thermal expansion
Tapered side wall
Spiral pattern deposition
|Specifications||Pattern Dimension +/-1um
Position, Pitch +/-3um
Over all size max 450mmx500mm
Alternative technology of lift-off to save cost and to think Ecology.